Yokkaichi Plant is devoted not only to tangible and intangible measures so as to be prepared for disasters but also to the training and drills for the implementation of these measures so that we can respond promptly and appropriately in the event of a disaster in order to minimize damage.

Basic Policy for Safety and Health of Yokkaichi Plant

Preparations for Earthquakes

Base isolation device

Fab 4 completed in September 2007 and all the fabs constructed thereafter are equipped with a state-of-the-art base isolation system that reduces the peak floor acceleration during an earthquake to roughly one-fourth.

Base isolation device

Earthquake Early Warning (EEW) System

The EEW system detects the P (primary) waves before the arrival of more damaging S (secondary) waves in order to estimate the arrival time of the S waves and the seismic intensity within a few seconds. In response to a warning, a safety system automatically shuts down the fab equipment and announces the oncoming earthquake in order to mitigate property damage and protect employees’ safety.

Earthquake Early Warning (EEW) System

Anti-seismic measures for equipment

In order to prevent secondary accidents, all the systems and equipment in the fab are firmly secured to the floor in accordance with stringent in-house standards.
* Some of the various safety measures in place are shown below.

Example 1: Secured equipment

Example 1: Secured equipment

Example 2: Secured tank

Example 2: Secured tank

Employee safety confirmation system

In the event of a disaster, an online system automatically contacts all the employees to check their safety.
This system uses multiple means of communication to reach all employees promptly.

Emergency supplies storerooms

We have many storerooms for emergency supplies inside Yokkaichi Plant. Water, food, first-aid supplies, and other items are stocked in readiness for a major disaster.

Preparations for power outage

Protection for instantaneous voltage dips (IVDs)

We have various IVD compensators in place in order to prevent critical process interruptions.

◇IVD compensators

IVD compensators

An IVD compensator, which incorporates batteries, electric double-layer capacitors and superconducting coils to store electric energy, releases it in the event of an instantaneous voltage dip.

1) Uninterruptible power supplies (UPS)

Uninterruptible power supplies (UPS)

A UPS, which stores electric energy in batteries, provides emergency power for a certain period.

2) Superconducting magnetic energy storage (SMES)

An SMES system stores energy in the magnetic field created by a superconducting coil.

Superconducting magnetic energy storage

3) Electric double-layer capacitors (EDLCs)

An EDLC stores electric energy in a capacitor.

Electric double layer capacitors

Preparations for power outage

Yokkaichi Plant is equipped with emergency generators.
The emergency generator automatically starts in the event of power failure. It acts as a backup power source for the operation of safety-related facilities as well as for the safe shutdown of fab equipment.

◇Emergency generator

Emergency generator

The emergency generator incorporates a diesel engine to generate electric energy.

Fire prevention

◇Ultrahigh sensitive smoke detector

Ultra-high-sensitivity smoke detector

Ultrahigh sensitive smoke detectors are installed in the cleanrooms.
These smoke detectors detect smoldering fires from electric wiring and equipment at an early stage.

◇Deployment of a fire engine

Deployment of a fire engine

To extinguish a fire at an early stage, Yokkaichi Plant owns a fire engine. The fire response team conducts a water-spraying drill once a month to ensure preparedness in the event of a fire.

Safety Measures for High-Pressure Gases

◇Safety measures for equipment

Safety measures for equipment
Safety measures for equipment

All the gas facilities are equipped with safety devices to shut off the gas supply in the event of leakage.
In addition, all the production systems in the cleanroom are automated, and systems using gases are equipped with automatic safety shutdown function coupled with a gas detector.
Furthermore, equipments using gases are subject to inspection by technical advisors prior to deployment to ensure further safety.

◇Daily management of equipment

Daily management of equipment
Daily management of equipment

At Yokkaichi Plant, we check the condition of all gas facilities three times a day, including their pressure and temperature and the operation of gas detectors.
We also conduct voluntary inspections periodically to keep them in perfect condition as per legal requirements, which include the safety of cylinder cabinets and the operation of scrubbers.

◇Measures for enhancing management skills

Measures for enhancing management skills
Measures for enhancing management skills

We periodically hold emergency drills at the facilities where gases are used, provide employees with compliance education, invite instructors from the High Pressure Gas Safety Institute of Japan to gas safety seminars, and conduct various awareness-raising activities such as gas burning experiments. These activities are designed to enhance the management skills of engineers and other operators and to increase the number of qualified employees.

Other Programs

Disaster prevention agreement with Yokkaichi City

Yokkaichi Plant has a disaster prevention agreement with Yokkaichi City not only to prevent accidents, fires, and other disasters at the plant but also to secure the safety of the local community.

Disaster prevention agreement with the city of Yokkaichi
Disaster prevention agreement with the city of Yokkaichi
Disaster prevention agreement with the city of Yokkaichi