Research papers
Research papers
2020 Conference Presentation and Publication List*
2020 Conference Presentation and Publication List*
* All authors at submission are basically our company's employees. Written in English.
- A TCAD Study on Mechanism and Countermeasure for Program Characteristics Degradation of 3D Semicircular Charge Trap Flash Memory
- N. Kariya, et al.
- 2020 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD)
- Weight compression MAC accelerator for effective inference of deep learning
- A. Maki, et al.
- IEICE Transactions on Electronics, E103C(10), pp. 514-523
- Experimental Extraction of Impact of Depletion Capacitance on Low Frequency Noise in Sub-Micron nMOSFETs with Reverse Body Bias
- C. Tanaka, et al.
- IEEE Transactions on Semiconductor Manufacturing, 33(2),9050647, pp. 146-149
- Novel Statistical Modeling and Parameter Extraction Methodology of Cutoff Frequency for RF-MOSFETs
- C. Tanaka, et al.
- IEEE International Conference on Microelectronic Test Structures, 2020-May,9107914
- Thyristor Operation for High Speed Read/Program Performance in 3D Flash Memory with Highly Stacked WL-Layers
- H. Horii, et al.
- 2020 IEEE International Memory Workshop, IMW 2020 – Proceedings, 9108147
- Emerging Usage and Evaluation of Low Latency FLASH
- T. Shiozawa, et al.
- 2020 IEEE International Memory Workshop, IMW 2020 – Proceedings, 9108145
- Breakdown Lifetime Analysis of HfO2-based Ferroelectric Tunnel Junction (FTJ) Memory for In-Memory Reinforcement Learning
- M. Yamaguchi, et al.
- IEEE International Reliability Physics Symposium Proceedings, 2020-April, 9129314
- Further Investigation on Mechanism of Trap Level Modulation in Silicon Nitride Films by Fluorine Incorporation
- H. Seki, et al.
- IEEE International Reliability Physics Symposium Proceedings, 2020-April,9128224
- Experimental Extraction of Impact of Depletion Capacitance on Low Frequency Noise in Sub-Micron nMOSFETs with Reverse Body Bias
- C. Tanaka, et al.
- IEEE Transactions on Semiconductor Manufacturing, 33(2),9050647, pp. 146-149
- Ab initio calculation of interlayer exchange coupling in Co-based synthetic antiferromagnet with alloy spacer
- R. Takashima, et al.
- AIP Advances, 10(1),015324
- Process technologies leading a future of semiconductor memory (KIOKU) devices (Plenary)
- K. Hashimoto
- SPIE advanced lithography 2020, Technical Program pp.6-7, 11323-501
2019 Conference Presentation and Publication List*
2019 Conference Presentation and Publication List*
* All authors at submission are basically our company's employees. Written in English.
- Formation of High Reliability Hydrogen-free MONOS Cells Using Deuterated Ammonia
- M. Noguchi, et al.
- Technical Digest - International Electron Devices Meeting, IEDM, 2019-December,8993586
- Can in-memory/analog accelerators be a silver bullet for energy-efficient inference?
- J. Deguchi, et al.
- Technical Digest - International Electron Devices Meeting, IEDM, 2019-December,8993500
- Future of Non-Volatile Memory -From Storage to Computing- (Plenary)
- K. Ishimaru
- Technical Digest - International Electron Devices Meeting, IEDM, 2019-December,8993609
- High-Efficient Adaptive Modulation for PWM-Based Multi-Level Perpendicular Magnetic Recording on Insufficient Resolution Channel
- K. Harada
- IEEE Transactions on Magnetics, 55(11),8784414
- Multi-Level Modulation for High-Speed Wireless and Wireline Transceivers
- R. Fujimoto
- 2019 IEEE International Symposium on Radio-Frequency Integration Technology, RFIT 2019 – Proceedings, 8929137
- A perspective on NVRAM technology for future computing system
- K. Hoya, et al.
- 2019 International Symposium on VLSI Design, Automation and Test, VLSI-DAT 2019, 8741675
- Novel cleaning technology for nanoparticle removal
- M. Tanabe, et al.
- Proceedings of SPIE - The International Society for Optical Engineering, 11148,111480N
- Capability of DUV inspection for the LWR improved EUV mask of sub-15 nm hp on wafer
- M. Naka, et al.
- Proceedings of SPIE - The International Society for Optical Engineering, 11148,111480X
- Low Operation Current Cell Technology for Terabit-Scale Memory Applications (Invited)
- M. Saitoh, et al.
- Non-Volatile Memory Technology Symposium 2019 (NVMTS2019), pp.98-99
- Current-Induced Domain Wall Motion in Pd-based Multilayered Structures with Different Ferromagnetic Layer Composition
- M. Kado, et al.
- 64th Annual Conference on Magnetism and Magnetic Materials (MMM2019), HB-03
- Robust Estimation of Mixed Type Wafer Map Similarity Utilizing Non negative Matrix
- Y. Tanaka, et al
- Proceedings of AEC/APC Symposium Asia 2019, TDA-022.
- High Performance In-Zn-O FET with High On-current and Ultralow (<10-20 A/μm) Off-state Leakage Current for Si CMOS BEOL Application
- N. Saito, et al.
- AM-FPD 2019 - 26th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, Proceedings 8830602
- Random Telegraph Noise after Hot Carrier Injection in Tri-gate Nanowire Transistor
- K. Ota, et al.
- 2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019, 8731025, pp. 169-171
- Multi-criteria hotspot detection using pattern classification
- K. Shiozawa, et al.
- Proceedings of SPIE - The International Society for Optical Engineering, 10962,109620T
- Lithography hotspot candidate detection using coherence map
- T. Matsunawa, et al.
- Proceedings of SPIE - The International Society for Optical Engineering, 10962,109620Q
- Half-pitch 14nm direct patterning with nanoimprint lithography
- T. Kono, et al.
- Proceedings of SPIE - The International Society for Optical Engineering, 10958,109580H
- Tungsten/In-Sn-O stacked source/drain electrode structure of In-Ga-Zn-O thin-film transistor for low-contact resistance and suppressing channel shortening effect
- J. Kataoka, et al.
- Japanese Journal of Applied Physics, 58(SB),SBBJ03
- Next Generation Memory System in Data-centric Computing
- M. Takahashi, et al.
- 2019 International Conference on Solid State Devices and Materials (SSDM2019), H-5-01 (Invited)
- ReRAM Opportunities for In-Memory Computing
- K. Ota
- 2019 International Conference on Solid State Devices and Materials (SSDM2019), Short Course A-04
- Advanced Plasma Etching for the State-of-the-Arts Memories
- H. Hayashi, et al.
- 2019 International Conference on Solid State Devices and Materials (SSDM2019), Satellite Workshop SW-03
- Experimental Extraction of Body Bias Dependence of Low Frequency Noise in sub-micron MOSFETs from Subthreshold to Moderate Inversion Regime
- C. Tanaka, et. al.
- IEEE International Conference on Microelectronic Test Structures, ICMTS-2019, 8730953, pp. 162-165
- Post Training Weight Compression with Distribution-based Filter-wise Quantization Step
- S. Sasaki, et al.
- IEEE Symposium on Low-Power and High-Speed Chips and Systems, COOL CHIPS 2019 - Proceedings 8721356
- Ag Ionic Memory Cell Technology for Terabit-Scale High-Density Application
- S. Fujii, et al.
- IEEE Symposium on VLSI Technology, Digest of Technical Papers, pp. TT189-TT190
- Overview in Three-Dimensionally Arrayed Flash Memory Technology
- R. Katsumata
- IEEE Symposia on VLSI Technology and Circuits, Short Course 1
- A 12.8-Gb/s Daisy Chain-Based Downlink I/F Employing Spectrally Compressed Multi-Band Multiplexing for High-Bandwidth, Large-Capacity Storage Systems
- Y. Tsubouchi, et al.
- IEEE Journal of Solid-State Circuits, 54(4),8613011, pp. 1086-1095
- Live demonstration: FPGA-based CNN accelerator with filter-wise-optimized bit precision
- K. Nakata, et al.
- Proceedings - IEEE International Symposium on Circuits and Systems, 2019-May, 8702208
- Circuit-size reduction for parallel chien search using minimal polynomial degree reduction
- N. Kokubun, et al.
- Proceedings - IEEE International Symposium on Circuits and Systems, 2019-May, 8702075
- Grain-boundary-limited carrier mobility in polycrystalline silicon with negative temperature dependence: Modeling carrier conduction through grain-boundary traps based on trap-assisted tunneling
- M. Hogyoku, et al.
- Japanese Journal of Applied Physics, 58(SB), SBBA01
- Comprehensive study of variability in poly-Si channel nanowire transistor
- K. Ota, et al.
- Japanese Journal of Applied Physics, 58(SB), SBBA06
- Evaluation of electron traps in SiNx by discharge current transient spectroscopy: Verification of validity by comparing with conventional DLTS
- H. Seki, et al.
- Japanese Journal of Applied Physics, 58(SB), SBBK02
- High mobility (>30 cm2 V-1 s-1) and low source/drain parasitic resistance In-Zn-O BEOL transistor with ultralow <10-20 A μm-1 off-state leakage current
- N. Saito, et al.
- Japanese Journal of Applied Physics, 58(SB), SBBJ07
- Investigation of Switching-Induced Local Defects in Oxide-Based CBRAM Using Expanded Analytical Model of TDDB
- R. Ichihara, et al.
- IEEE Transactions on Electron Devices, 66(5), 8676360, pp. 2165-2171
- A 25.6Gb/s Uplink-Downlink Interface Employing PAM-4-Based 4-Channel Multiplexing and Cascaded CDR Circuits in Ring Topology for High-Bandwidth and Large-Capacity Storage Systems
- T. Toi, et al.
- Digest of Technical Papers - IEEE International Solid-State Circuits Conference, pp. 478 - 480
- Device Challenges and Opportunities for ReRAM
- K. Ota
- IEEE International Reliability Physics Symposium, IRPS 2019 - Tutorial
- 3D Flash Memory - Electrical and Physical Characterizations for Memory Cell Reliability -
- Y. Mitani
- IEEE International Conference on Microelectronic Test Structures, ICMTS 2019 - Tutorial
2018 Conference Presentation and Publication List*
2018 Conference Presentation and Publication List*
* All authors at submission are basically our company's employees. Written in English.
- Improving thickness uniformity of sputter-deposited films by using magnet rotation speed control technique
- T. Miura, et al.
- IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings, 2018-December, 8651152
- Fixed charge control of silylated surface for stiction-free drying with surface energy reduction process
- T. Koide, et al.
- Solid State Phenomena, 282 SSP, pp. 168-174
- Deep Learning in DFM Applications
- T. Matsunawa, et. al.
- Proceedings Volume 10810, Photomask Technology 2018; 1081006
- FPGA-Based CNN Processor with Filter-Wise-Optimized Bit Precision
- A. Maki, et al.
- Proceedings of 2018 IEEE Asian Solid-State Circuits Conference (A-SSCC2018) pp.47-50
- Non-Volatile Memory for Data Age (Invited)
- K. Ishimaru
- Proceedings of the International Conference on Solid-State and Integrated Technology 2018 (ICSICT-2018) pp. 1215-1218
- Formation Mechanism of Sidewall Striation in High-Aspect-Ratio Hole Etching
- M. Omura, et al.
- 40th International Symposium on Dry Process (DPS2018), H-2, pp. 293-294
- Footprints of RF CMOS Compact Modeling Technology from Wireless Communication to IoT Applications
- S. Yoshitomi
- Proceedings of 25th International Conference Mixed Design of Integrated Circuits and Systems, MIXDES 2018, 8436911, pp. 22-28
- Evaluation of Electron Traps in SiN by Discharging Current Transient Spectroscopy: Verification of Validity by Comparing with Conventional DLTS
- H. Seki, et al.
- 2018 International Conference on Solid State Devices and Materials (SSDM2018) pp.325-326
- High mobility (>30 cm2/Vs) and Low S/D Parasitic Resistance In-Zn-O BEOL Transistor with Ultralow (<10-20 A/μm) Off Leakage Current
- N. Saito, et al.
- 2018 International Conference on Solid State Devices and Materials (SSDM2018) pp.573-574
- Performance improvement by template-induced crystallization in ferroelectric HfO2 tunnel junction memory for cross-point high-density application
- S. Kabuyanagi, et al.
- 2018 International Conference on Solid State Devices and Materials (SSDM2018) pp.205-206
- Effect of Tin and Gallium Composition on the Instability of Amorphous Indium-Gallium-Zinc-Tin-Oxide (IGZTO) Thin-Film Transistors under Positive Gate Bias
- D. Zhao, et al.
- 2018 International Conference on Solid State Devices and Materials (SSDM2018) pp.805-806 (Late News)
- Grain-Boundary-Limited Polycrystalline-Silicon Mobility with Negative Temperature Dependence ~ Modeling of Carrier Conduction through Grain-Boundary Traps Based on Trap-Assisted Tunneling ~
- M. Hogyoku, et al.
- 2018 International Conference on Solid State Devices and Materials (SSDM2018) pp. 825-826
- Stacked Source/Drain Electrode Structure of InGaZnO Thin-Film-Transistor for Low Contact Resistance and Suppressing Channel Shortening Effect
- J. Kataoka, et al.
- 2018 International Conference on Solid State Devices and Materials (SSDM2018) pp.1269-1270 (Late News)
- Comprehensive Study of Variability in Poly-Si Channel Nanowire Transistor ~ Grain Boundary effect in Variability ~
- K. Ota, et al.
- 2018 International Conference on Solid State Devices and Materials (SSDM2018) pp.235-236 (Late News)
- Emerging Non-Volatile Memory and Thin-Film Transistor Technologies for Future 3D-LSI (Invited)
- M. Saitoh, et al.
- 48th European Solid-State Device Research Conference (ESSDERC) 2018, pp.138-141
- Performance and Reliability of Ferroelectric HfO2 Tunnel Junction Memory (Invited)
- S. Fujii, et al.
- 2018 ISAF-FMA-AMF-AMEC-PFM Joint Conference (IFAAP2018)
- Reliability of HfO2-based Ferroelectric Tunnel Junction Memory (Invited)
- M. Yamaguchi, et al.
- Non-Volatile Memory Technology Symposium 2018 (NVMTS2018)
- A 12.8 Gb/s Daisy Chain-Based Downlink I/F Employing Spectrally Compressed Multi-Band Multiplexing for High-Bandwidth and Large-Capacity Storage Systems
- Y. Tsubouchi, et al.
- IEEE Symposium on VLSI Circuits, Digest of Technical Papers, pp. 149-150
- Suppression of channel shortening effect for InGaZnO Thin-Film-Transistor by In-Sn-O source/drain electrodes
- J. Kataoka, et al.
- 2018 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2018 - Proceedings 8421427, pp. 175-177
- Origin of High Mobility in InSnZnO MOSFETs
- N. Saito, et al.
- 2018 IEEE Electron Devices Technology and Manufacturing Conference, EDTM 2018 -Proceedings 8421530, pp. 172-174
- 3D Flash Memory for Data-Intensive Applications (Keynote)
- S. Inaba
- 2018 IEEE 10th International Memory Workshop, IMW 2018 pp. 1-4
- Comprehensive investigation on parameter extraction methodology for short channel amorphous-InGaZnO thin-film transistor
- C. Tanaka, et al.
- IEEE International Conference on Microelectronic Test Structures 2018-March, pp. 23-26
- Cooperative simulation of lithography and topography for three-dimensional high-aspect-ratio etching
- T. Ichikawa, et al.
- Japanese Journal of Applied Physics 57(6), 06JC01
- Multiscale modeling for SiO2 atomic layer deposition for high-aspect-ratio hole patterns
- Y. Miyano, et al.
- Japanese Journal of Applied Physics 57(6), 06JB03
- Hot carrier degradation, TDDB, and 1/f noise in Poly-Si Tri-gate nanowire transistor
- Y. Yoshimura, et al.
- IEEE International Reliability Physics Symposium Proceedings 2018-March, pp. 5A.61-5A.66
- Density-functional study on the dopant-segregation mechanism: Chemical potential dependence of dopant-defect complex at Si/SiO2 interface
- H. Kawai, et al.
- Journal of Applied Physics 123(16), 161425
- Charge-based Neuromorphic Cell by InGaZnO Transistor and Implementation of Simple Scheme Spike-Timing-Dependent Plasticity
- C. Tanaka, et al.
- Proceedings - IEEE International Symposium on Circuits and Systems 2018-May, 8350932
- Hotspot detection based on surrounding optical feature
- Y. Abe, et al.
- Proceedings of SPIE - The International Society for Optical Engineering 10588, 105880I
- Updates of nanoimprint lithography for production and applications for next generation memory devices
- T. Higashiki
- Proceedings of SPIE - The International Society for Optical Engineering 10584, 105840T
- Origin of high mobility in InSnZnO MOSFETs
- N. Saito, et al.
- IEEE Journal of the Electron Devices Society 6,8546783, pp. 1258-1262
2017 Conference Presentation and Publication List*
2017 Conference Presentation and Publication List*
* All authors at submission are basically our company's employees. Written in English.
- Study of CO2 ashing for porous SiOCH film using 100 MHz/13.56 MHz dual frequency superimposed capacitive coupled plasma
- T. Imamura, et al.
- Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics 35(6), 062201
- Development of an Energy-Saving Controller for Sub Apparatus
- T. Ozaki
- IEEE Transactions on Semiconductor Manufacturing 30(4), 8057857, pp. 367-370
- Metrology and inspection required for next generation lithography
- M. Asano, et al.
- Japanese Journal of Applied Physics 56(6), 06GA01
- Application of EB repair for nanoimprint lithography template
- A, Kumada, et al.
- Proceedings of SPIE - The International Society for Optical Engineering 10454, 104540Q
- Accurate lithography simulation model based on convolutional neural networks
- Y. Watanabe, et al.
- Proceedings of SPIE - The International Society for Optical Engineering 10454, 104540I
- DUV inspection beyond optical resolution limit for EUV mask of hp 1X nm
- M. Naka, et al.
- Proceedings of SPIE - The International Society for Optical Engineering 10451, 104510K
- Multi-scale modeling for SiO2 plasma-enhanced atomic layer deposition at high-aspect-ratio hole patterns
- Y. Miyano, et al.
- 39th International Symposium on Dry Process (DPS2017), B-3, pp. 19-20
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